Characteristics and application of ultra-precision micro-nano forming tools (3)

UPC nanospheres end cutter Example <br> <br> nano ball end mill molding instance milling three-dimensional surface can be confirmed by a radius R = 300? M nano ball end mill, it is possible It is formed into a spherical surface with a very high degree of sphericity and a high-precision surface without burrs. The surface topography measuring instrument was used to measure the shape accuracy of a microsphere nest on the array mold, and its PV value (peak-to-peak) was 166 nm.

UPC nano grooving knife (super fine groove cutting tool)


The two nano-end milling cutters described above are used for milling, while the nano-grooving knives use a shaving and flying-cutting method to machine ultra-fine linear grooves on the workpiece forming surface. We have machined the world's smallest level of 5?m slot width. The most representative application of this tool is the forming of a holographic optical element (HOE) mold. The optical element is a polarization beam splitter which produces a diffraction phenomenon of light by means of a lens having a plurality of ultra-fine grooves having a groove pitch of up to a micron order, thereby achieving arbitrary decomposition and convergence of the spectrum. The optical effects of several optical lenses are combined into one holographic optical element (HOE). In the past, these optical components were fabricated by semiconductor processing techniques (such as photolithography), but when processed by this method, the bottom edge of the right-angled groove should be rounded; when the deep groove is processed, the forming process of the groove is Decomposed into multiple step formations, thus creating horizontal differences that reduce light utilization.

Unlike the processing method, a plastic holographic optical element (HOE) manufactured by a mold formed by a nano-grooving knife has better shape accuracy and surface roughness. In addition, the method has the advantage of high processing efficiency. With the development of photovoltaic technology in recent years, the demand for smaller ultra-fine groove forming processing is still increasing.

Conclusion <br> <br> article describes the micro and nano UPC shaping tool based on processing characteristics and examples of three-dimensional micro-machined molding. In the three-dimensional micro-forming process using a diamond cutting tool, the shape of the tool tip is reproduced to the workpiece to be processed with high precision. Undoubtedly, in the application of surface forming processing technology, the future market will put forward higher requirements for nano-scale processing precision.

The performance and control technology of ultra-precision forming machines and the accuracy under machining conditions are constantly being improved and improved. Therefore, we are working to further improve the precision and miniaturization of diamond cutting tools.

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